Sample holder and electron microscope
AssigneeHitachi, Ltd.
InventorsToshiaki Tanigaki, Akira Sugawara, Fumiaki Ichihashi
Life of this patent
Estimating the term…
Loading patent…
AssigneeHitachi, Ltd.
InventorsToshiaki Tanigaki, Akira Sugawara, Fumiaki Ichihashi
Estimating the term…
There are provided a sample holder that allows in-situ observation of a sample such as a gas or liquid under light irradiation and an electron microscope. An environment cell is formed in combination of two silicon chips, each including a membrane and a frame supporting the membrane, the frame being provided on the opening. The environment cell is accommodated in a main body of the sample holder, and fixed by a lid. The openings of the lid, the two silicon chips, and the main body are placed so as to overlap with each other along the optical axis of an electron beam of an electron microscope. A light emitting element is placed at a position where any one of the openings of the two silicon chips is allowed to be irradiated with light.
A sample holder that holds an environment cell enclosing a sample, which is an observation target by an electron microscope, the sample holder comprising:
Dependencies are inferred from the claim text.