Blanker-enhanced moire imaging
AssigneeFEI Company
InventorsBert Freitag, Erik Kieft
Life of this patent
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Abstract
In some embodiments, a scientific instrument includes an electron-beam column configured to scan an electron beam across a sample. The electron-beam column includes a beam blanker configured to gate the electron beam in response to a drive signal. The scientific instrument also includes an electron detector configured to measure a flux of transmitted or scattered electrons having interacted with the sample and an electronic controller configured to acquire an image of the sample using values of the flux measured with the electron detector for a plurality of electron-beam scan locations. The electronic controller is further configured to cause the drive signal to have a gating frequency at which the image has a moiré pattern therein.
Claims20
A scientific instrument, comprising:
- an electron-beam column configured to scan an electron beam across a sample, the electron-beam column including a beam blanker configured to gate the electron beam in response to a drive signal;
- an electron detector configured to measure a flux of transmitted or scattered electrons having interacted with the sample;
- and
- an electronic controller configured to:
- acquire an image of the sample using values of the flux measured with the electron detector for a plurality of electron-beam scan locations;
- and
- cause the drive signal to have a gating frequency at which the image has a moiré pattern therein.
A moiré imaging method, comprising:
- scanning an electron beam across a sample with an electron-beam column including a beam blanker configured to gate the electron beam in response to a drive signal;
- measuring, with an electron detector, a flux of transmitted or scattered electrons having interacted with the sample;
- acquiring, with an electronic controller, an image of the sample using values of the measured flux for a plurality of electron-beam scan locations;
- and
- causing, with the electronic controller, the drive signal to have a gating frequency at which the image has a moiré pattern therein.
Dependencies are inferred from the claim text.