X-ray apparatus, electron emission device and manufacturing method
AssigneeKETEK GmbH Halbleiter- und Reinraumtechnik
InventorsMichael Bachmann, Simon Edler, Andreas Schels, Florian Herdl, Natalie Galfe, Georg Düsberg
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Abstract
In an embodiment an X-ray apparatus includes at least one of an X-ray source configured for generating X-rays or an X-ray detector configured for detecting X-rays, a housing in which the at least one of the X-ray source or the X-ray detector is located, the housing having an opening and a window covering the opening, wherein the window is configured to be passed by the X-rays, wherein the window comprises a transmission layer, and wherein the transmission layer is a carbon layer of glassy carbon.
Claims9
An electron emission device comprising:
- an electrically conductive base layer;
- an intermediate layer directly on the base layer, wherein the intermediate layer is of a material having a band gap leading to a higher energy of a conduction band edge of the intermediate layer compared to the base layer;
- and
- an electrically conductive gate layer directly on a side of the intermediate layer remote from the base layer,
- wherein a breakdown voltage of the intermediate layer exceeds a work function of the gate layer divided by an elementary charge,
- wherein the gate layer is a carbon layer of glassy carbon, and
- wherein the electron emission device is configured to emit electrons through the gate layer upon applying a voltage between the base layer and the gate layer.
Dependencies are inferred from the claim text.