Container for accommodating substrate with effective hermetic sealing

A container for accommodating a substrate, comprising:

• a base having a top horizontal surface;
• and
• a lid having at least one filter channel and a storage space, wherein the lid contacts with the base, the storage space and the top horizontal surface define an accommodating space for accommodating the substrate, at least one contact interface is defined when a bottom surface of the lid directly contacts with a top surface of the base to encircle the top horizontal surface and thereby seal the accommodating space, the at least one contact interface has a gap less than 0.08 mm, and when the accommodating space is vacuumed with a gas backfill process applied to an outer space of the container to cause an air flow entering to enter into the container, the gap is set such that at least 90% of the air flow passes through the filter channel to enter the accommodating space of the container.

A container for accommodating a substrate, comprising:

• a base having a top horizontal surface and at least one first supporting surface encircling the top horizontal surface;
• and
• a lid having at least one filter channel, a bottom surface and a flange encircling the bottom surface, the flange having at least one second supporting surface encircling the bottom surface, the at least one second supporting surface at least in part contacting with the at least one first supporting surface of the base such that the bottom surface, the flange and the top horizontal surface define an accommodating space for accommodating the substrate, wherein the at least one first supporting surface and the at least one second supporting surface have a flatness less than 0.04 mm, and a gap is formed between the at least one first supporting surface and the second support surface, which causes an effective seal in the accommodating space, and when the accommodating space is vacuumed with a gas backfill process applied to an outer space of the container to cause an air flow entering to enter into the container, the gap is set such that at least 90% of the air flow passes through the filter channel to enter the accommodating space of the container.