Testing device and method, and non-transitory computer-readable recording medium
AssigneeTokyo Electron Limited
InventorsShinjiro Watanabe, Taisei Kondo
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AssigneeTokyo Electron Limited
InventorsShinjiro Watanabe, Taisei Kondo
Estimating the term…
A testing device includes photographing, segmenting, position determining, and position adjusting units. The photographing unit is configured to photograph a needle tip of a probe needle provided in a probe card used for testing of a test object. The segmenting unit is configured to recognize a needle region and a needle tip region of a validation image photographed by the photographing unit, by inputting the validation image to a segmentation model that is trained as described in the specification. The position determining unit is configured to determine a position of the needle tip based on a positional relationship between the needle region and the needle tip region. The position adjusting unit is configured to adjust a relative position between the test object and the needle tip of the probe needle based on the position of the needle tip determined by the position determining unit.
A testing device, comprising:
A testing method, comprising:
A non-transitory computer-readable recording medium storing a program that causes a control device to execute a process comprising:
Dependencies are inferred from the claim text.