US 12,638,412 B2Granted

Sensor and capacitor device

AssigneeKabushiki Kaisha Toshiba

InventorNaoki Hiramatsu

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Abstract

According to one embodiment, a sensor includes a base including a first base region and a second base region, and an element section. The element section includes a fixed electrode fixed to the second base region, a first fixed member fixed to the first base region, a first intermediate member supported by the first fixed member, a first connecting member supported by the first intermediate member, a movable portion, and a first support member. The first connecting member includes a first connecting portion, a second connecting portion, and a third connecting portion. The movable portion is connected to the second connecting portion. The movable portion includes a movable electrode. A first gap is provided between the fixed electrode and the movable portion. The first support member is fixed to the base. The first support member supports the third connecting portion.

Claims17

Dependent claims

A sensor, comprising:

a base including a first base region and a second base region;
and
an element section,
the element section including
a fixed electrode fixed to the second base region,
a first fixed member fixed to the first base region,
a first intermediate member supported by the first fixed member,
a first connecting member supported by the first intermediate member, the first connecting member including a first connecting portion, a second connecting portion, and a third connecting portion between the first connecting portion and the second connecting portion, a direction from the first connecting portion to the second connecting portion being along a second direction crossing a first direction from the first base region to the first fixed member,
a movable portion connected to the second connecting portion, the movable portion including a movable electrode, a first gap being provided between the fixed electrode and the movable portion, and
a first support member fixed to the base, the first support member supporting the third connecting portion,
wherein
when a first distance between the base and the first connecting portion along the first direction decreases, a second distance between the base and the second connecting portion along the first direction increases.

9 more elements

A sensor, comprising:

a base including a first base region and a second base region;
and
an element section,
the element section including
a fixed electrode fixed to the second base region,
a first fixed member fixed to the first base region,
a first intermediate member supported by the first fixed member,
a first connecting member supported by the first intermediate member, the first connecting member including a first connecting portion, a second connecting portion, and a third connecting portion between the first connecting portion and the second connecting portion, a direction from the first connecting portion to the second connecting portion being along a second direction crossing a first direction from the first base region to the first fixed member,
a movable portion connected to the second connecting portion, the movable portion including a movable electrode, a first gap being provided between the fixed electrode and the movable portion, and
a first support member fixed to the base, the first support member supporting the third connecting portion,
wherein
a first distance along the first direction between the base and the first connecting portion in a first state is shorter than the first distance in a second state, and
a second distance along the first direction between the base and the second connecting portion in the first state is longer than the second distance in the second state.

10 more elements

A capacitor device, comprising:

a base including a first base region and a second base region;
and
an element section,
the element section including
a fixed electrode fixed to the second base region,
a first fixed member fixed to the first base region,
a first intermediate member including a first conductive member, the first intermediate member being supported by the first fixed member,
a first connecting member supported by the first intermediate member, the first connecting member including a first connecting portion, a second connecting portion, and a third connecting portion between the first connecting portion and the second connecting portion, a direction from the first connecting portion to the second connecting portion being along a second direction crossing a first direction from the first base region to the first fixed member,
a movable portion connected to the second connecting portion, the movable portion including a movable electrode, a first gap being provided between the fixed electrode and the movable portion,
a first support member fixed to the base, the first support member supporting the third connecting portion,
wherein
when a current is supplied to the first conductive member, a first distance between the base and the first connecting portion along the first direction decreases, and a second distance between the base and the second connecting portion along the first direction increases.

9 more elements

Dependencies are inferred from the claim text.

Facts

Application: 18/352,140Filed 13 Jul 2023
Priority: JP 2023-0348967 Mar 2023
Published: US 2024/0302310 A112 Sep 2024
Granted: 26 May 2026
Term ends: Not estimatedThe source records don’t support an estimate.

Classification5 codes

G01N 27/226
By investigating capacitance: construction of measuring vessels; Electrodes therefor
H01G 4/005
Details: electrodes
G01N 2027/222
By investigating the dielectric properties: for analysing gases
G01N
Investigating or analysing materials by determining their chemical or physical properties