Junction-isolated semiconductor strain gauge
AssigneeSensata Technologies, Inc.
InventorsGerard Klaasse, Robert Zwijze, Robert Mckellar, Shihong Huo, Jan-Willem Sloetjes
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AssigneeSensata Technologies, Inc.
InventorsGerard Klaasse, Robert Zwijze, Robert Mckellar, Shihong Huo, Jan-Willem Sloetjes
Estimating the term…
Apparatuses that include a junction-isolated semiconductor strain gauge and methods for manufacturing a junction-isolated semiconductor strain gauge are disclosed. In a particular embodiment, an apparatus comprises a silicon chip that includes a silicon substrate and a semiconductor strain gauge. In this embodiment, the semiconductor strain gauge includes a plurality of resistors formed by locally doping the silicon substrate and biasing the silicon substrate such that the resistors of the plurality of resistors are junction-isolated. The silicon chip also includes a field shield layer to isolate an output signal of the semiconductor strain gauge from external electrical fields.
An apparatus comprising:
An apparatus comprising:
Dependencies are inferred from the claim text.