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US 12,638,335 B2Granted
Sensor element, and sensor device
AssigneeThe University of Tokyo
InventorsSatoru Nakatsuji, Ryota Uesugi, Tomoya Higo
Life of this patent
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Abstract
A sensor element for detecting electromagnetic waves includes a substrate, an absorber configured to absorb the electromagnetic waves and generate heat, and at least one thermoelectric conversion element disposed between the substrate and the absorber to support a part of the absorber and configured to generate an electromotive force from the heat generated in the absorber by a transverse thermoelectric effect.
Claims6
A sensor element for detecting electromagnetic waves, comprising:
- a substrate;
- an absorber configured to absorb the electromagnetic waves and generate heat;
- at least one thermoelectric conversion element disposed between the substrate and the absorber to support a part of the absorber and configured to generate an electromotive force from the heat generated in the absorber by a transverse thermoelectric effect;
- and
- a first insulating film between the absorber and the at least one thermoelectric conversion element, the first insulating film being made of an insulating material with a higher thermal conductivity than that of a material of the at least one thermoelectric conversion element.
2 more elements
A sensor device comprising:
- a substrate;
- and
- a plurality of sensor structures arranged in a matrix on the substrate, each of the plurality of sensor structures comprising:
- an absorber configured to absorb electromagnetic waves and generate heat;
- at least one thermoelectric conversion element disposed between the substrate and the absorber to support a part of the absorber and configured to generate an electromotive force from the heat generated in the absorber by a transverse thermoelectric effect;
- and
- a first insulating film between the absorber and the at least one thermoelectric conversion element, the first insulating film being made of an insulating material with a higher thermal conductivity than that of a material of the at least one thermoelectric conversion element.
4 more elements
Dependencies are inferred from the claim text.