Vapor chamber structure and manufacturing method thereof

A manufacturing method of a vapor chamber structure, comprising:

• providing a first flexible base material and a second flexible base material, wherein the first flexible base material comprises a first polymer material layer and a first copper foil layer, and the second flexible base material comprises a second polymer material layer and a second copper foil layer;
• forming a first capillary structure layer and a second capillary structure layer on the first copper foil layer and the second copper foil layer, respectively, wherein the first copper foil layer is located between the first polymer material layer and the first capillary structure layer, the first polymer material layer, the first copper foil layer, and the first capillary structure layer define a first flexible substrate, the second copper foil layer is located between the second polymer material layer and the second capillary structure layer, and the second polymer material layer, the second copper foil layer, and the second capillary structure layer define a second flexible substrate;
• sandwiching a spacer between the first capillary structure layer and the second capillary structure layer, wherein the first capillary structure layer, the spacer, and the second capillary structure layer define a chamber, the spacer has a top surface, a bottom surface opposite to the top surface, and a plurality of grooves penetrating the spacer and connecting the top surface and the bottom surface, and the first copper foil layer, the first capillary structure layer, the spacer, the second copper foil layer, and the second capillary structure layer are retracted by a distance relative to the first polymer material layer and the second polymer material layer to form a space;
• filling the chamber with a working fluid, wherein the working fluid is located among the first capillary structure layer, the second capillary structure layer, and the grooves;
• performing a vacuuming process on the chamber, and forming a flexible sealing member to seal the space, wherein the first copper foil layer, the second copper foil layer, and the flexible sealing member define a sealed chamber, and the first capillary structure layer, the second capillary structure layer, and the grooves are located in the sealed chamber;
• and
• performing a drilling process on at least one of the first polymer material layer and the second polymer material layer to form at least one opening, the at least one opening correspondingly exposing at least one of the first copper foil layer and the second copper foil layer.