Back to results
US 12,638,176 B2Granted
Vacuum pump, detoxifying device, and exhaust gas processing system
AssigneeEdwards Japan Limited
InventorYoshihiro Enomoto
Life of this patent
Estimating the term…
Abstract
Provided is a vacuum pump that can realize energy conservation when performing abatement of exhaust gas. A vacuum pump that sucks in and exhausts exhaust gas includes a motor serving as a drive source, and a first controller that controls driving of the motor. The first controller monitors a state of the motor, and in a case in which the state of the motor is a specific state excluding when starting up and when stopped, outputs a specific signal (process signal) to an external entity.
Claims4
A vacuum pump that sucks in and exhausts exhaust gas, the vacuum pump comprising:
- a motor serving as a drive source;
- and
- a first controller that controls driving of the motor, wherein
- the first controller monitors a state of the motor, and in a case in which the state of the motor is a specific state, outputs a specific signal to an external entity,
- the specific state:
- excludes when starting up and when stopped, is a state in which the motor is in normal operations, and a current of the motor exceeds a predetermined threshold value, and
- the first controller:
- outputs the specific signal to the external entity while the current of the motor exceeds the predetermined threshold value, and
- maintains output of the specific signal to the external entity until a predetermined amount of time elapses after the current of the motor becomes no greater than the predetermined threshold value.
6 more elements
Dependencies are inferred from the claim text.