Back to results
US 12,637,787 B2Granted
Laminated structure and method for manufacturing laminated structure
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsTakenori Watabe, Hiroshi Hashigami, Masayuki Tanno
Life of this patent
Estimating the term…
Abstract
A laminated structure includes a crystalline substrate and a crystalline oxide film containing gallium as a main component and having a β-gallia structure, wherein the crystalline substrate is a crystalline substrate containing lithium tantalate as a main component. This provides an inexpensive laminated structure having a thermally stable crystalline oxide film.
Claims6
A laminated structure comprising a crystalline substrate and a crystalline oxide film containing gallium as a main component and having a β-gallia structure,
- wherein the crystalline substrate is a lithium tantalate single crystal substrate,
- the crystalline oxide film is β-Ga2O3,
- a main surface of the lithium tantalate single crystal substrate is a C-plane, and
- a crystal orientation of the lithium tantalate single crystal substrate is within Z±10°.
1 more element
Dependencies are inferred from the claim text.