In-situ fingerprinting for electrochemical deposition and/or electrochemical etching

An electrochemical system for electrochemical deposition and/or electrochemical etching and for analysis comprising:

• one or more working electrodes that are substrates,
• one or more reference electrodes, wherein each of the one or more reference electrodes is a pH-electrode,
• two or more counter-electrodes;
• and
• one or more capillary tubes configured to convey electrolyte from the one or more working electrodes to the one or more reference electrodes;
• one or more additional capillary tubes configured to convey electrolyte from the two or more counter-electrodes to one or more additional reference electrodes;
• wherein the one or more additional capillary tubes comprise a capillary tube for each counter-electrode, and the one or more additional reference electrodes comprise a reference electrode for each counter-electrode;
• wherein the electrochemical system is configured to analyze one or more potentials between the one or more working electrodes and the one or more reference electrodes to provide one or more output signals, the one or more output signals being represented as one parameter as a function of a second parameter, said parameters being selected from the group of:
• potential difference, time, temperature, current, real component of impedance, imaginary component of impedance, or frequency.