Substrate processing apparatus
AssigneeSamsung Display Co., Ltd.
InventorsChoelmin Jang, Junggon Kim, Min-Gyu Park, Heeyong Lee, Eun Jung, Myungsoo Huh
Life of this patent
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Abstract
A substrate processing apparatus may include a chamber having a working space, maintaining a vacuum state, and including an upper wall positioned on the working space, a nozzle assembly positioned in the working space, and including nozzles, and a lifting module including a frame positioned outside of the chamber, a lifting part that lifts the frame, and at least one shaft passing through the upper wall, connected to each of the frame and the nozzle assembly, and extending in a direction of gravity.
Claims20
A substrate processing apparatus comprising:
- a chamber having a working space, maintaining a vacuum state, and including an upper wall positioned on the working space;
- a nozzle assembly positioned in the working space and including nozzles arrayed in a plane of the nozzle assembly;
- and
- a lifting module comprising:
- a frame positioned outside of the chamber;
- a lifting part that lifts the frame;
- and
- at least one shaft passing through the upper wall, connected to the frame and connected to the nozzle assembly outside of the nozzles in the plane of the nozzle assembly, and extending in a direction of gravity.
A substrate processing apparatus comprising:
- a chamber having a working space, maintaining a vacuum state, and including an upper wall positioned on the working space;
- a nozzle assembly positioned in the working space and including nozzles;
- and
- a lifting module comprising:
- a frame positioned outside of the chamber;
- a lifting part that lifts the frame;
- and
- at least one shaft passing through the upper wall, connected to the frame and the nozzle assembly, and extending in a direction of gravity,
- wherein:
- the lifting module further comprises a first fastening part positioned between the upper wall and the frame, surrounding the at least one shaft, fixed to the at least one shaft, and having a flat plate shape, and
- the substrate processing apparatus further comprises at least one first elastic member connected to a bottom surface of the first fastening part and an upper surface of the upper wall, the at least one first elastic member being expandable and contractible in the direction of gravity, and
- wherein:
- the nozzle assembly has an overall rectangular shape in a plan view,
- the at least one shaft includes a plurality of shafts, and
- the plurality of the shafts are positioned at vertices of the rectangular shape of the nozzle assembly.
A substrate processing apparatus comprising:
- a chamber having a working space, maintaining a vacuum state, and including an upper wall positioned on the working space;
- a nozzle assembly positioned in the working space and including nozzles;
- a lifting module comprising:
- a frame positioned outside of the chamber;
- a lifting part that lifts the frame;
- a shaft passing through the upper wall, connected to the frame and the nozzle assembly, and extending in a direction of gravity;
- and
- a first fastening part positioned between the upper wall and the frame, surrounding the shaft, fixed to the shaft, and having a flat plate shape;
- a gas supply pipe passing through the upper wall, connected to the nozzle assembly, and supplying gas to the nozzle assembly;
- a second fastening part positioned on the upper wall, surrounding the gas supply pipe, fixed to the gas supply pipe, and having a flat plate shape;
- a first elastic member connected to a bottom surface of the first fastening part and an upper surface of the upper wall, and expandable and contractible in the direction of gravity;
- and
- a second elastic member connected to a bottom surface of the second fastening part and the upper surface of the upper wall, and expandable and contractible in the direction of gravity.
Dependencies are inferred from the claim text.