Coating chamber with distance detection for the substrates

A coating chamber for coating substrates the coating chamber comprising at least a first chamber wall and a coating region through which successive substrates to be coated are conveyed, the first chamber wall comprising a gas-tight unit comprising a first window for IR radiation and a second window for IR radiation, wherein the coating chamber further comprises a detector for IR radiation which is arranged such that IR radiation from the coating region can impinge on the detector through the windows of the gas-tight unit, wherein the coating chamber further comprises a processor which is adapted and configured to determine the distance between two successive substrates to be coated on the basis of the IR radiation detected by the detector, wherein the coating chamber further comprises a second chamber wall opposite the first chamber wall, which comprises an IR radiation source arranged such that IR radiation from the IR radiation source can impinge on the detector through the coating region and through the first and/or second windows of the gas-tight unit, wherein the coating chamber further comprises an optical element between the IR radiation source and the coating region, wherein the optical element consists of a material the thermal conductivity of which is at most 10 W/m·K.

A coating chamber for coating substrates the coating chamber comprising at least a first chamber wall and a coating region through which successive substrates to be coated are conveyed, the first chamber wall comprising a gas-tight unit comprising a first window for IR radiation and a second window for IR radiation, wherein the first window of the gas-tight unit closes the first chamber wall in a vacuum-tight manner and the second window of the gas-tight unit is arranged within the coating chamber between the coating region and the first window, wherein the coating chamber further comprises a detector for IR radiation which is arranged such that IR radiation from the coating region can impinge on the detector through the first and/or second windows of the gas-tight unit, wherein the coating chamber further comprises a processor which is adapted and configured to determine the distance between two successive substrates to be coated on the basis of the IR radiation detected by the detector, wherein the successive substrates define a plane, wherein the second window comprises a free opening area to which an inner diameter can be inscribed, and wherein the distance between the second window and the plane is at most five times the inner diameter.