A substrate treating apparatus for performing a predetermined treatment on a substrate, the apparatus comprising:
- a spin table configured to be rotatable around a vertical axis;
- a motor configured to rotate the spin table in a horizontal plane;
- a holding mechanism configured to hold the substrate in a horizontal posture while the substrate is spaced apart from a top face of the spin table, the holding mechanism including:
- a plurality of support pins provided so as to be rotatable freely around the vertical axis on a part of the top face of the spin table adjacent to an outer circumference, and configured to rotate between a holding position contacting a periphery edge of the substrate for restricting movement of the substrate in a horizontal direction, and a delivery position spaced apart from the periphery edge of the substrate for allowing movement of the substrate;
- a first magnetic part configured to rotate the plurality of support pins individually between the holding position and the delivery position by switching surrounding magnetic poles;
- and
- a second magnetic part configured to rotate the plurality of support pins individually to the holding position by constantly applying a magnetic field to the first magnetic part;
- a switching mechanism provided with a third magnetic part having a larger magnetic force than that of the second magnetic part and configured to apply no magnetic field of the third magnetic part to the first magnetic part when the substrate is not being delivered and to apply a magnetic field of the third magnetic part to the first magnetic part to rotate the plurality of support pins individually to the delivery position only when the substrate is delivered;
- and
- a cover that is located so as to cover the motor below the spin table and has resistance to a treatment liquid supplied to the substrate;
- wherein
- an upper surface of the cover has a downwardly receding portion accommodating a lower part of the first magnetic part and a lower part of the second magnetic part,
- when applying a magnetic force to the first magnetic part, the third magnetic part is configured to laterally face the first magnetic part across the cover,
- the spin table includes a carrier plate on a lower face of arrangement of the plurality of support pins that is configured to support the plurality of support pins,
- the carrier plate includes a first end along an arc of the spin table, a second end opposite to the first end relative to the arc of the spin table, an attachment part for the plurality of support pins, the attachment part being formed adjacent to the first end, a round screw hole formed adjacent to the first end and configured to perform screwing and fixation to the spin table, a long threaded screw hole having a longitudinal axis in a radial direction of the spin table, formed adjacent to the second end, and configured to screw to the spin table, and
- the first end is moved in the radial direction of the spin table while a screw in the long threaded screw hole is released for adjusting positions of the plurality of support pins in the radial direction of the spin table.