Method for making halogen doped optical element
AssigneeCorning Incorporated
InventorsSteven Bruce Dawes, Douglas Hull Jennings, Pushkar Tandon
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Abstract
A method of forming an optical element is provided. The method includes producing silica-based soot particles using chemical vapor deposition, the silica-based soot particles having an average particle size of between about 0.05 μm and about 0.25 μm. The method also includes forming a soot compact from the silica-based soot particles and doping the soot compact with a halogen in a closed system by contacting the silica-based soot compact with a halogen-containing gas in the closed system at a temperature of less than about 1200° C.
Claims11
A method of forming an optical element, the method comprising:
- producing silica-based soot particles using chemical vapor deposition, the silica-based soot particles having an average particle size between about 0.05 microns and about 0.25 microns and a particulate surface area greater than about 20 m2/g, and the silica-based soot particles having a titania content from about 1.0 wt. % to about 14 wt. %;
- pressing the silica-based soot particles with a pressing mechanism to form a soot compact from the silica-based soot particles, the pressing mechanism asserting a pressure on the silica-based soot particles of less than about 1000 psi, the soot compact having a density from about 0.50 g/cc to about 1.20 g/cc;
- doping the soot compact with a halogen in a closed system to form a doped soot compact, the doped soot compact comprising the halogen,
- wherein, during the doping of the soot compact with the halogen, maintaining a total pressure in the closed system of about 0.25 atm or greater;
- consolidating the doped soot compact by simultaneously increasing the temperature of the doped soot compact and decreasing a concentration of a dopant containing gas in the closed system, while still actively flowing the dopant containing gas in the closed system, to form a glass article;
- and
- annealing the glass article to form the optical element,
- wherein the optical element has a slope of coefficient of thermal expansion versus temperature at 20° C. of less than about 1.0 ppb/K2.
Dependencies are inferred from the claim text.