Liquid ejecting apparatus, imprint apparatus, and control method
AssigneeCanon Kabushiki Kaisha
InventorsTakahiro Hosokawa, Hisashi Namba, Noriyasu Hasegawa
Life of this patent
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Abstract
A liquid ejecting apparatus includes an ejection unit including an ejection surface in which an orifice through which a liquid is ejected is open, an oscillating element provided with the orifice, a retention member arranged opposite the ejection surface and configured to retain a liquid between the retention member and the ejection surface, a detection unit configured to detect an oscillation characteristic of the oscillating element, and a control unit configured to, in a case of cleaning the orifice, drive the oscillating element at a drive period based on a detection result of the detection unit in a state in which the liquid is retained between the retention member and the ejection surface.
Claims9
A liquid ejecting apparatus, comprising:
- an ejection unit including an ejection surface in which an orifice through which a liquid is ejected is open;
- an oscillating element provided with the orifice;
- a retention member arranged opposite the ejection surface and configured to retain a liquid between the retention member and the ejection surface;
- a detection unit configured to detect an oscillation characteristic of the oscillating element;
- and
- a control unit configured to identify a natural period of the oscillating element based on a detection result, and configured to, in a case of cleaning the orifice, drive the oscillating element at a drive period based on the natural period in a state in which the liquid is retained between the retention member and the ejection surface,
- wherein letting the natural period be T and the drive period be Td,
- T≤Td≤T×1.2.
A liquid ejecting apparatus, comprising:
- an ejection unit including an ejection surface in which an orifice through which a liquid is ejected is open;
- an oscillating element provided with the orifice;
- a retention member arranged opposite the ejection surface and configured to retain a liquid between the retention member and the ejection surface;
- a detection unit configured to detect an oscillation characteristic of the oscillating element;
- and
- a control unit configured to identify a natural period of the oscillating element based on a detection result, and configured to, in a case of cleaning the orifice, drive the oscillating element at a drive period based on the natural period in a state in which the liquid is retained between the retention member and the ejection surface,
- wherein letting the natural period be T and the drive period be Td,
- (n×T−T×0.2)≤Td≤(n×T+T×0.2),
- where n is a natural number 2 or higher.
A liquid ejecting apparatus comprising:
- an ejection unit including an ejection surface in which an orifice through which a liquid is ejected is open;
- an oscillating element provided with the orifice;
- a retention member arranged opposite the ejection surface and configured to retain a liquid between the retention member and the ejection surface;
- a detection unit configured to detect an oscillation characteristic of the oscillating element;
- and
- a control unit configured to, in a case of cleaning the orifice, drive the oscillating element at a drive period based on a detection result of the detection unit in a state in which the liquid is retained between the retention member and the ejection surface,
- wherein the oscillating element is a piezoelectric element configured to be driven by supply of a drive signal so as to generate energy for causing a liquid to be ejected from the orifice,
- wherein the control unit is configured to drive the piezoelectric element by a different number of drive signals per unit time between in a case of causing a liquid to be ejected from the orifice onto an ejection target and in a case of cleaning the orifice, and
- wherein a waveform of the drive signal is a trapezoidal wave, a square wave, a saw wave, or a triangular wave.
An imprint apparatus comprising a liquid ejecting apparatus and operable to perform an imprint process on a substrate by ejecting liquid from the liquid ejecting apparatus,
- wherein the liquid ejecting apparatus comprises:
- an ejection unit including an ejection surface in which an orifice through which a liquid is ejected is open;
- an oscillating element provided with the orifice;
- a retention member arranged opposite the ejection surface and configured to retain a liquid between the retention member and the ejection surface;
- a detection unit configured to detect an oscillation characteristic of the oscillating element;
- and
- a control unit configured to identify a natural period of the oscillating element based on a detection result, and configured to, in a case of cleaning the orifice, drive the oscillating element at a drive period based on the natural period in a state in which the liquid is retained between the retention member and the ejection surface,
- wherein letting the natural period be T and the drive period be Td,
- T≤Td≤T×1.2.
Dependencies are inferred from the claim text.