Method for producing joined body and device for producing joined body
AssigneeNippon Electric Glass Co., Ltd.
InventorToru Shiragami
Life of this patent
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Abstract
In a method for producing a bonded body, a bonding step includes a supporting step of mounting a laminate on a support device, and a pressing step of pressing the laminate. A pressing member of the support device is a transparent glass plate formed in a circular shape. A sealing member of the support device is configured to circularly surround the laminate between the pressing member and the base member. The pressing step lowers the atmospheric pressure in the housing space by an atmospheric pressure adjusting device, thereby causing the pressing member to adhere to the sealing member and pressing the laminate with the pressing member.
Claims9
A method for producing a bonded body including a first substrate, a second substrate, and a sealing layer bonding the first substrate and the second substrate, the method comprising:
- laminating to form a laminate by overlapping the first substrate and the second substrate while interposing a sealing material between the first substrate and the second substrate;
- and
- bonding to form the sealing layer by irradiating the sealing material in the laminate with a laser beam,
- wherein the bonding includes supporting to mount the laminate on a support device, pressing the laminate, and performing the irradiating of the sealing material with the laser beam to form the laminate,
- wherein the support device includes
- a pressing member configured to press the laminate,
- a base member supporting the pressing member,
- a sealing member disposed between the pressing member and the base member,
- a housing space for the laminate formed between the pressing member and the base member, and
- an atmospheric pressure adjusting device configured to adjust an atmospheric pressure in the housing space,
- wherein the pressing member is a transparent glass plate formed in a circular shape,
- wherein the sealing member is configured to circularly surround the laminate between the pressing member and the base member, and
- wherein the pressing includes suctioning gas from the housing space by the atmospheric pressure adjusting device to make the pressing member adhere to the sealing member and to press the laminate with the pressing member.
A device for producing a bonded body, the bonded body including a first substrate, a second substrate, and a sealing layer bonding the first substrate and the second substrate, the device comprising:
- a support device configured to support a laminate formed by overlapping the first substrate and the second substrate while interposing a sealing material between the first substrate and the second substrate;
- and
- a laser irradiation device configured to irradiate the sealing material in the laminate with a laser beam to form the sealing layer,
- wherein the support device includes
- a pressing member configured to press the laminate,
- a base member supporting the pressing member,
- a sealing member disposed between the pressing member and the base member,
- a housing space for the laminate formed between the pressing member and the base member, and
- an atmospheric pressure adjusting device configured to adjust an atmospheric pressure in the housing space,
- wherein the pressing member is a transparent glass plate formed in a circular shape,
- wherein the sealing member is configured to circularly surround the laminate between the pressing member and the base member, and
- wherein the atmospheric pressure adjusting device is configured to suction gas from the housing space to make the pressing member adhere to the sealing member and to press the laminate with the pressing member.
Dependencies are inferred from the claim text.