Systems and methods for formation of continuous channels within transparent materials

A system comprising:

• a laser source configured to generate a laser beam;
• a focus optic configured to converge the laser beam to a first focal region having a first width within a vent positioned within a transparent material;
• one or more translation stages configured to move the first focal region from the vent and below a top surface of the transparent material along a first scan path;
• and
• a controller configured to control at least one of the laser source and the one or more translation stages to form a continuous channel within the transparent material generally along the first scan path, wherein the continuous channel has the vent to outside the transparent material located at least at one end, wherein the controller is further configured to control the translation stage to move a second focal region having a second width from the vent along a second scan path that is substantially parallel to and separated by a separation distance from the first scan path to widen a width of the continuous channel, wherein the second width of the second focal region along the second scan path partially overlaps the first width of the first focal region along the first scan path.