Liquid supply unit and substrate treating apparatus

A substrate treating apparatus, comprising:

• a chamber housing defining an inner space;
• a support configured to support a substrate in the inner space;
• and
• a liquid supply configured to supply a liquid to a substrate supported on the support, and
• wherein the liquid supply includes:
• a first nozzle including a first supply pipe configured to supply a first liquid, a first rotation part at a bottom part of the first supply pipe, and a first electromagnetic clutch at a bottom part of the first rotation part;
• a second nozzle including a second supply pipe configured to supply a second liquid, a second rotation part at a bottom part of the second supply pipe, and a second electromagnetic clutch at a bottom part of the second rotation part;
• a motor configured to provide a rotation force to the first electromagnetic clutch;
• and
• a first belt which interlocks a rotation of the first electromagnetic clutch and the second electromagnetic clutch such that the second rotation part moves with the first rotation part when the motor provides the rotation force.

A substrate treating apparatus, comprising:

• a chamber housing defining an inner space;
• a support configured to support a substrate in the inner space;
• and
• a liquid supply configured to supply a liquid to a substrate supported on the support, and
• wherein the liquid supply includes:
• a first nozzle including a first supply pipe configured to supply a first liquid, a first rotation part at a bottom part of the first supply pipe, and a first electromagnetic clutch at a bottom part of the first rotation part;
• a second nozzle including a second supply pipe configured to supply a second liquid, a second rotation part provided at a bottom part of the second supply pipe, and a second electromagnetic clutch at a bottom part of the second rotation part;
• a third nozzle including a third supply pipe configured to supply a third liquid, a third rotation part at a bottom part of the third supply pipe, and
• a third electromagnetic clutch at a bottom part of the third rotation part;
• a motor configured to provide a rotation force to the first electromagnetic clutch;
• a first belt which interlocks a rotation of the first electromagnetic clutch and the second electromagnetic clutch such that the second rotation part moves with the first rotation part when the motor provides the rotation force;
• and
• a second belt which interlocks a rotation of the first electromagnetic clutch and the third electromagnetic clutch such that the third rotation part moves with the first rotation part when the motor provides the rotation force.