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AssigneesTamura Corporation, Novel Crystal Technology, Inc.
InventorNobuo Machida
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A method for manufacturing a semiconductor element includes preparing a semiconductor wafer that includes a substrate including a Ga2O3-based semiconductor and an epitaxial layer including a Ga2O3-based semiconductor and located on the substrate, fixing the epitaxial layer side of the semiconductor wafer to a support substrate, thinning the substrate of the semiconductor wafer fixed to the support substrate, after the thinning of the substrate, forming an electrode on a lower surface of the substrate, bonding or forming a support metal layer on a lower surface of the electrode of the semiconductor wafer, and dicing the semiconductor wafer into individual pieces, thereby obtaining plural semiconductor elements each including the support metal layer. Thermal conductivity of the support metal layer is higher than thermal conductivity of the substrate.
A semiconductor device, comprising:
A semiconductor device, comprising:
Dependencies are inferred from the claim text.