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US 12,635,466 B2Granted
Ceramic plate
AssigneeNGK Insulators, Ltd.
InventorsTakahiro Ando, Shinsuke Yuda, Koichi Yoshino, Akiyoshi Hattori
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Abstract
Provided is a ceramic plate including the ceramic substrate containing aluminum oxide and/or aluminum nitride; the inner electrode embedded inside the ceramic substrate containing an electrode base material, a thermal expansion coefficient modifier, and Ti; and wherein the ceramic substrate has a Ti diffusion region in which Ti is diffused around the inner electrode.
Claims11
A ceramic plate comprising:
- a ceramic substrate comprising aluminum oxide and/or aluminum nitride;
- and
- an inner electrode embedded inside the ceramic substrate, the inner electrode comprising an electrode base material, a thermal expansion coefficient modifier, and Ti,
- wherein the ceramic substrate comprises a Ti diffusion region in which Ti is diffused around the inner electrode,
- wherein the electrode base material is at least one selected from the group consisting of Mo, W, WC, MoC, Nb, and NbC, and
- wherein a content of the electrode base material in the inner electrode is from 40 to 98% by weight.
3 more elements
Dependencies are inferred from the claim text.