Load-bearing device, wafer transfer device, chamber device and wafer processing apparatus

A wafer transfer device, comprising:

• a load-bearing device being arranged to function as a first carrier stage which is liftable vertically by arranging a first direction along which an ejector rod extends in a vertical direction, the load-bearing device being telescopic relative to a reference object and comprising:
• a base;
• a movable platform, opposite to the base;
• the ejector rod, which is configured to extend through a bearing secured to the base and is coupled to the movable platform;
• and
• a driving member, which is fixed relative to the reference object and is configured to push against the ejector rod and in turn to drive the ejector rod to displace relative to the base,
• wherein the load-bearing device further comprises a corrugated tube assembly, which is arranged to surround the ejector rod and comprises a first corrugated tube sleeved on the ejector rod, an upper edge and a lower edge of the first corrugated tube being bonded to a first surface of the movable platform facing towards the base and an upper surface of the base in a sealed manner respectively, the ejector rod and the first corrugated tube cooperating with each other to define collectively a first space which is located below the first surface of the movable platform and communicates to an atmospheric environment through a gap between the ejector rod and the bearing,
• wherein the corrugated tube assembly further comprises an external tube wrapped outside the first corrugated tube,
• wherein an upper edge and a lower edge of the external tube are bonded to the first surface of the movable platform and the upper surface of the base in a sealed manner respectively, and the base, the movable platform, the first corrugated tube, and the external tube cooperate with one another to define collectively a second space located below the first surface of the movable platform, and
• wherein the movable platform is further provided with a second surface facing away from the base, both the first surface and the second surface being planar and perpendicular to an axis of the ejector rod, with an area of a portion of the first surface delimited between the first corrugated tube and the external tube being smaller than an area of the second surface;
• a second carrier stage, which is also liftable vertically;
• and
• an arm assembly, provided between the first carrier stage and the second carrier stage and comprising:
• a rotary shaft which is vertically suspended;
• and
• a rotary arm, comprising a rod-shaped body which is rotatably mounted at a lower end of the rotary shaft around a vertical axis of the rotary shaft and extends along a longitudinal axis orthogonal to the vertical axis,
• wherein the rotary shaft further comprises two supporting portions, which are formed respectively at both ends opposite to each other of the body, and are configured to rotate around the vertical axis so as to perform a wafer transfer action from a top of one of the first carrier stage and the second carrier stage to a top of the other of the first carrier stage and the second carrier stage, by a supporting effect applied by the two supporting portions.

A chamber device configured to exchange a first wafer and a second wafer between different pressure environments, the chamber device comprising:

• a first housing, defining an interior vacuum chamber delimited therein as a first pressure environment and defining an outside of the first housing as a second pressure environment, the first housing being further provided with an opening communicating between the first pressure environment and the second pressure environment;
• and
• a wafer transfer device, which is provided inside the vacuum chamber and comprises:
• a load-bearing device being arranged to function as a first carrier stage which is liftable vertically by arranging a first direction along which an ejector rod extends in a vertical direction, with the first carrier stage being arranged to at least partially overlap with the opening, the load-bearing device being telescopic relative to a reference object and comprising:
• a base;
• a movable platform, opposite to the base;
• the ejector rod, which is configured to extend through a bearing secured to the base and is coupled to the movable platform;
• and
• a driving member, which is fixed relative to the reference object and is configured to push against the ejector rod and in turn to drive the ejector rod to displace relative to the base,
• wherein the load-bearing device further comprises a corrugated tube assembly, which is arranged to surround the ejector rod and comprises a first corrugated tube sleeved on the ejector rod, an upper edge and a lower edge of the first corrugated tube being bonded to a first surface of the movable platform facing towards the base and an upper surface of the base in a sealed manner respectively, the ejector rod and the first corrugated tube cooperating with each other to define collectively a first space which is located below the first surface of the movable platform and communicates to an atmospheric environment through a gap between the ejector rod and the bearing,
• wherein the corrugated tube assembly further comprises an external tube wrapped outside the first corrugated tube,
• wherein an upper edge and a lower edge of the external tube are bonded to the first surface of the movable platform and the upper surface of the base in a sealed manner respectively, and the base, the movable platform, the first corrugated tube, and the external tube cooperate with one another to define collectively a second space located below the first surface of the movable platform, and
• wherein the movable platform is further provided with a second surface facing away from the base, both the first surface and the second surface being planar and perpendicular to an axis of the ejector rod, with an area of a portion of the first surface delimited between the first corrugated tube and the external tube being smaller than an area of the second surface;
• a second carrier stage, which is also liftable vertically;
• and
• an arm assembly, provided between the first carrier stage and the second carrier stage and comprising:
• a rotary shaft which is vertically suspended;
• and
• a rotary arm, comprising a rod-shaped body which is rotatably mounted at a lower end of the rotary shaft around a vertical axis of the rotary shaft and extends along a longitudinal axis orthogonal to the vertical axis,
• wherein the rotary shaft further comprises two supporting portions, which are formed respectively at both ends opposite to each other of the body, and are configured to rotate around the vertical axis so as to perform a wafer transfer action from a top of one of the first carrier stage and the second carrier stage to a top of the other of the first carrier stage and the second carrier stage, by a supporting effect applied by the two supporting portions;
• wherein the transfer device further comprises a valve plate, which is co-axially provided on the first carrier stage and is configured to be elevated or lowered with the first carrier stage so as to close or open the opening.

A wafer processing apparatus, comprising:

• a first housing, defining an interior vacuum chamber, in which a wafer processing device or a wafer detection device is installed;
• a wafer transfer device, comprising:
• a load-bearing device being arranged to function as a first carrier stage which is liftable vertically by arranging a first direction along which an ejector rod extends in a vertical direction, the load-bearing device being telescopic relative to a reference object and comprising:
• a base;
• a movable platform, opposite to the base;
• the ejector rod, which is configured to extend through a bearing secured to the base and is coupled to the movable platform;
• and
• a driving member, which is fixed relative to the reference object and is configured to push against the ejector rod and in turn to drive the ejector rod to displace relative to the base,
• wherein the load-bearing device further comprises a corrugated tube assembly, which is arranged to surround the ejector rod and comprises a first corrugated tube sleeved on the ejector rod, an upper edge and a lower edge of the first corrugated tube being bonded to a first surface of the movable platform facing towards the base and an upper surface of the base in a sealed manner respectively, the ejector rod and the first corrugated tube cooperating with each other to define collectively a first space which is located below the first surface of the movable platform and communicates to an atmospheric environment through a gap between the ejector rod and the bearing,
• wherein the corrugated tube assembly further comprises an external tube wrapped outside the first corrugated tube,
• wherein an upper edge and a lower edge of the external tube are bonded to the first surface of the movable platform and the upper surface of the base in a sealed manner respectively, and the base, the movable platform, the first corrugated tube, and the external tube cooperate with one another to define collectively a second space located below the first surface of the movable platform, and
• wherein the movable platform is further provided with a second surface facing away from the base, both the first surface and the second surface being planar and perpendicular to an axis of the ejector rod, with an area of a portion of the first surface delimited between the first corrugated tube and the external tube being smaller than an area of the second surface;
• a second carrier stage, which is also liftable vertically;
• and
• an arm assembly, provided between the first carrier stage and the second carrier stage and comprising:
• a rotary shaft which is vertically suspended;
• and
• a rotary arm, comprising a rod-shaped body which is rotatably mounted at a lower end of the rotary shaft around a vertical axis of the rotary shaft and extends along a longitudinal axis orthogonal to the vertical axis,
• wherein the rotary shaft further comprises two supporting portions, which are formed respectively at both ends opposite to each other of the body, and are configured to rotate around the vertical axis so as to perform a wafer transfer action from a top of one of the first carrier stage and the second carrier stage to a top of the other of the first carrier stage and the second carrier stage, by a supporting effect applied by the two supporting portions;
• and
• a second housing, which is adjacent to the first housing and defines a transition chamber,
• wherein, the first housing is formed with an opening communicating to the second housing, and the first carrier stage of the wafer transfer device is arranged to at least partially overlap with the opening;
• the wafer transfer device further comprises a valve plate, which is co-axially provided on the first carrier stage and is configured to be elevated or lowered with the first carrier stage so as to close or open the opening;
• and
• the transition chamber communicates with the vacuum chamber via the opening at one side thereof, and also communicates with the atmospheric environment via a second valve at the other side thereof.