Method of displaying substrate arrangement data, method of manufacturing semiconductor device, non-transitory computer-readable recording medium and substrate processing apparatus

A method of displaying substrate arrangement data, comprising:

• (a) setting each of a transport parameter for determining at least an arrangement of substrates to be loaded into a substrate retainer and carrier information of a carrier storing the substrates to be loaded into the substrate retainer;
• (b) creating the substrate arrangement data of a case where the substrates are loaded into the substrate retainer based on the transport parameter and the carrier information set in (a);
• (c) displaying the substrate arrangement data at least comprising data representing the arrangement of the substrates in a state where the substrates are loaded in the substrate retainer;
• and
• (e) registering the data representing the arrangement of the substrates in the state where the substrates are loaded in the substrate retainer,
• wherein, in (b), a matching ratio between the data representing the arrangement of the substrates registered in (e) and each substrate arrangement data created by using a plurality of transport parameters stored in advance.

A substrate processing apparatus comprising:

• a process chamber in which substrates are processed;
• a substrate retainer capable of accommodating the substrates;
• a transfer structure capable of loading the substrates into the substrate retainer;
• and
• a controller configured to be capable of controlling the transfer structure,
• wherein the controller is further configured to be capable of performing:
• (a) setting each of a transport parameter for determining at least an arrangement of the substrates to be loaded into the substrate retainer and carrier information of a carrier storing the substrates to be loaded into the substrate retainer;
• (b) creating substrate arrangement data of a case where the substrates are loaded into the substrate retainer based on the transport parameter and the carrier information set in (a);
• (b-1) calculating a discrepancy ratio between the substrate arrangement data created in (b) and a target substrate arrangement data registered in advance by comparing the substrate arrangement data created in (b) and the target substrate arrangement data registered in advance;
• and
• (c) displaying the substrate arrangement data at least comprising data representing the arrangement of the substrates in a state where the substrates are loaded in the substrate retainer.