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US 12,635,448 B2Granted
High heat capacity hot plate
AssigneeTokyo Electron Limited
InventorHoyoung Kang
Life of this patent
Estimating the term…
Abstract
According to an embodiment, an apparatus for a hot plate apparatus is disclosed. The hot plate apparatus includes a housing structure, an alloy, and a heating element. The housing structure includes an outer shell surrounding a cavity. The alloy is disposed of within the cavity. The alloy has a melting temperature range. The heating element is configured to transition the alloy from a solid state to a liquid state at a set temperature between the melting temperature range.
Claims20
A hot plate apparatus, comprising:
- a housing structure having an outer shell surrounding a first cavity and a second cavity;
- a first alloy and a second alloy respectively disposed within the first cavity and the second cavity, the first alloy having a first melting temperature range, the second alloy having a second melting temperature range;
- a heating element;
- and
- a controller coupled to the heating element, the controller configured to:
- transition, using the heating element, the first alloy to a first temperature within the first melting temperature range during a first operating mode of the hot plate apparatus, and
- transition, using the heating element, the second alloy to a second temperature within the second melting temperature range during a second operating mode of the hot plate apparatus.
4 more elements
A hot plate apparatus, comprising:
- a housing structure having an outer shell surrounding a first cavity and a second cavity, the first cavity filled with a first alloy having a first melting range, the second cavity filled with a second alloy having a second melting range different than the first melting range;
- and
- a heating element configured to bring the first alloy to a first temperature within the first melting range during a first operating mode of the hot plate apparatus and to bring the second alloy to a second temperature within the second melting range during a second operating mode of the hot plate apparatus, the second temperature being higher than the first temperature,
- wherein, in the first operating mode, the heating element transitions the first alloy to the first temperature within the first melting range, and
- wherein, in the second operating mode, the heating element transitions the second alloy to the second temperature within the second melting range.
2 more elements
A method, comprising:
- operating a hot plate in a first operating mode and a second operating mode, the hot plate comprising a heating element, a housing structure with an outer shell surrounding a first cavity and a second cavity, a first alloy disposed within the first cavity and having a first melting temperature range, and a second alloy disposed within the second cavity and having a second melting temperature range,
- wherein, in the first operating mode, the method comprises transitioning, by the heating element, the first alloy to a first temperature within the first melting temperature range, and
- wherein, in the second operating mode, the method comprises transitioning, by the heating element, the second alloy to a second temperature within the second melting temperature range.
Dependencies are inferred from the claim text.