Layered solid state element comprising a ferroelectric layer and method for manufacturing the same
AssigneeUniversite De Franche-Comte
InventorsAusrine Bartasyte, Sabina Kuprenaite, Vincent Astié
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Abstract
A layered solid element includes a ferroelectric layer of a crystalline material Li1−x(Nb1−yTay)1+xO3+2x−z which has X- or 33°Y-orientation with respect to a substrate of the layered solid element. The ferroelectric layer is grown epitaxially from a buffer layer having of one of the chemical formulae LkNirO1.5·(k+r)+w or Ln+1NinO3+1+δ, where L is a lanthanide element. Such layered solid element may form a thin-film bulk acoustic resonator and be useful for integrated electronic circuits such as RF-filters, or guided optical devices such as integrated optical modulators.
Claims15
A layered solid element comprising a substrate and a layer stack supported by a face of the substrate, the layer stack comprising a buffer layer of a first crystalline material and a ferroelectric layer of a second crystalline material which are in direct contact with one another along an epitaxial interface, the buffer layer being closer to the substrate than the ferroelectric layer,
- wherein the first crystalline material is based on a first compound with chemical formula LkNirO1.5·(k+r)+w, where L is a lanthanide element or several lanthanide elements substituted to one another within said first crystalline material, Ni is nickel and O is oxygen, k is a first coefficient comprised between 0.7 and 1.3, r is a second coefficient comprised between 0.7 and 1.3, and w is a third coefficient comprised between −0.5 and +0.5,
- or the first crystalline material is based on another first compound chemical with formula Ln+1NinO3n+1+δ, where n is a non-zero integer, and δ is a coefficient comprised between −0.5 and +0.5,
- and the second crystalline material is based on lithium nobate, lithium tantalate or a second compound with chemical formula Li1−x(Nb1−yTay)1+xO3+2x−z, where Li is lithium, Nb is niobium, Ta is tantalum, x is another first coefficient comprised between 0 and 0.08, y is another second coefficient comprised between 0 and 1, and z is another third coefficient comprised between 0 and +0.5.
Dependencies are inferred from the claim text.