Semiconductor memory structure with contact passing through opening in control gate
AssigneeUnited Microelectronics Corp.
InventorsBoon Keat Toh, Chih-Hsin Chang, Szu Han Wu, Chi Ren
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AssigneeUnited Microelectronics Corp.
InventorsBoon Keat Toh, Chih-Hsin Chang, Szu Han Wu, Chi Ren
Estimating the term…
Provided are a semiconductor device and a manufacturing method thereof. The semiconductor device includes a substrate having a first memory region. The first memory region includes a first dielectric layer, a first floating gate, a first inter-gate dielectric layer, a control gate and a first contact. The first dielectric layer is disposed on the substrate. The first floating gate is disposed on the first dielectric layer. The first inter-gate dielectric layer is disposed on the first floating layer. The control gate is disposed on the first inter-gate dielectric layer. The first contact penetrates through the first control gate and the first inter-gate dielectric layer and is landed on the first floating gate.
A semiconductor device, comprising:
Dependencies are inferred from the claim text.