Termination structure
AssigneeSiliconix Incorporated
InventorsAyman Shibib, Jun Hu
Life of this patent
Estimating the term…
Abstract
A metal oxide semiconductor field effect transistor (MOSFET) device, and methods for manufacturing and using the same. In some implementations, the MOSFET device includes a plurality of gate structures which are parallel to each other and separated from each other, and a termination structure having a first edge adjacent to the plurality of gate structures and a second edge on a side of the termination structure opposite the first edge. Each of the plurality of gate structures has a curved edge adjacent to the first edge of the termination structure, and the second edge of the termination structure is curved concave to the curved edges of the plurality of gate structures.
Claims16
A metal oxide semiconductor field effect transistor (MOSFET) device, comprising:
- a plurality of gate structures which are parallel to each other and separated from each other;
- a termination structure having a first edge adjacent to the plurality of gate structures and a second edge on a side of the termination structure opposite the first edge;
- a mesa structure having a first edge adjacent to the second edge of the termination structure and a second edge on a side of the mesa structure opposite the first edge of the mesa structure;
- and
- a second termination structure having a straight edge adjacent to the second edge of the mesa structure;
- wherein each of the plurality of gate structures has a curved edge adjacent to the first edge of the termination structure, and wherein the second edge of the termination structure is curved concave to the curved edges of the plurality of gate structures;
- and
- wherein for a section of the mesa structure the first edge of the mesa structure is curved and the second edge of the mesa structure opposite the section and adjacent to the second termination structure is straight.
A method of manufacturing a metal oxide semiconductor field effect transistor (MOSFET) device, comprising:
- forming a plurality of gate structures which are parallel to each other and separated from each other;
- and
- forming a termination structure having a first edge adjacent to the plurality of gate structures and a second edge on a side of the termination structure opposite the first edge;
- forming a mesa structure having a first edge adjacent to the second edge of the termination structure and a second edge on a side of the mesa structure opposite the first edge of the mesa structure;
- and
- forming a second termination structure having a straight edge adjacent to the second edge of the mesa structure;
- wherein each of the plurality of gate structures has a curved edge adjacent to the first edge of the termination structure, and wherein the second edge of the termination structure is curved concave to the curved edges of the plurality of gate structures;
- and
- wherein for a section of the mesa structure the first edge of the mesa structure is curved and the second edge of the mesa structure opposite the section and adjacent to the second termination structure is straight.
Dependencies are inferred from the claim text.