Back to results
US 12,633,724 B2Granted
Variable-wavelength surface emission laser
AssigneeNational Institute of Information and Communications Technology
InventorsMotoaki Hara, Yuichiro Yano, Masatoshi Kajita, Tetsuya Ido, Satoshi Shinada, Takahito Ono, Masaya Toda
Life of this patent
Estimating the term…
Abstract
Provided is a variable-wavelength surface emission laser having a wide wavelength variation range. A partial region of a thin-plate substrate (22) and a movable mirror (20), the partial region being positioned between an air gap (G1) and a movable gap (G2), can move toward the air gap (G1) side or the movable gap (G2) side.
Claims4
A variable-wavelength surface emission laser comprising:
- a first substrate;
- a thin-plate substrate having a film thickness of substantially 1 micron, provided so as to face the first substrate via an air gap;
- and
- a second substrate provided so as to face the thin-plate substrate via a movable gap,
- wherein
- the first substrate includes a first reflection layer formed on and being in direct contact with one plane of the first substrate, an active layer formed on and being in direct contact with the first reflection layer, an insulating layer formed on and being in direct contact with the active layer, and a first movable electrode formed on and being in direct contact with the insulating layer,
- the thin-plate substrate includes a second reflection layer formed on a plane facing the active layer,
- the second substrate includes a second movable electrode formed on a plane opposite to the movable gap,
- the thin-plate substrate and the second reflection layer have a partial region movable toward the air gap side and the movable gap side, the partial region being positioned between the air gap and the movable gap, wherein
- the first movable electrode is configured to move the thin-plate substrate and the second reflection layer toward a side of the first substrate, and
- the second movable electrode is configured to move the thin-plate substrate and the second reflection layer toward a side of the second substrate,
- the first movable electrode is arranged around a light emitting region, and includes an arc-shaped movable electrode main body part having a space so as not to connect one end point to another end point, and a movable electrode extension part extended in a circumferential direction from the movable electrode main body part,
- the first movable electrode includes a plurality of movable electrode main body parts formed concentrically around the light emitting region,
- spaces between endpoints of the movable electrode main body parts, the spaces being extended from the plurality of movable electrode main body parts are located on the same axis extending in the circumferential direction from the light emitting region, and
- a movable electrode extension part provided on the movable electrode main body part on the inner peripheral side is formed so as to straddle the movable electrode main body part on the outer peripheral side via an insulating film.
12 more elements
Dependencies are inferred from the claim text.