Analysis device, analysis method, and analysis program

An analysis method using a signal processing device that measures a concentration, a partial pressure, or a value related to the concentration or the partial pressure of a reaction product generated while a workpiece is being processed in workpiece processing, the signal processing device including a laser light source that irradiates target gas containing the reaction product with a laser beam, a photodetector that detects the laser beam having passed through the target gas, and a processor configured to calculate the concentration, the partial pressure, or the value related to the concentration or the partial pressure of the reaction product based on a detection signal of the photodetector, the analysis method comprising:

• calculating a time integral by integrating an output value of the signal processing device with respect to time;
• calculating a processed amount of the workpiece using relationship data indicating a relationship between the time integral of integrating the output value of the signal processing device with respect to time, and the processed amount of the workpiece;
• and
• calculating variability in the processed amount across a plane of the workpiece, based on a temporal change in the output value of the signal processing device.

A computer-readable medium including an analysis program that is used in an analysis device including a signal processing device for measuring a concentration, a partial pressure, or a value related to the concentration or the partial pressure of a reaction product generated while a workpiece is being processed in workpiece processing, and that calculates a processed amount by which the workpiece is processed using an output value of the signal processing device, wherein the signal processing device includes a laser light source that irradiates target gas containing the reaction product with a laser beam, a photodetector that detects a laser beam having passed through the target gas, and a processor configured to calculate the concentration, the partial pressure, or the value related to the concentration or the partial pressure of the reaction product based on a detection signal of the photodetector, wherein the analysis program causes the processor to

• calculate a time integral obtained by integrating the output value of the signal processing device with respect to time;
• store therein relationship data indicating a relationship between the time integral of integrating the output value of the signal processing device with respect to time, and a processed amount by which the workpiece is processed;
• calculate a processed amount by which the workpiece has been processed, from the time integral obtained by the processor, and the relationship data;
• and
• calculate variability in the processed amount across a plane of the workpiece, based on a temporal change in the output value of the signal processing device.