SEM image enhancement methods and systems
AssigneeASML Netherlands B.V.
InventorsWei Fang, Lingling Pu, Thomas Jarik Huisman, Erwin Paul Smakman
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Abstract
Systems and methods for image enhancement are disclosed. A method for enhancing an image may include acquiring a first scanning electron microscopy (SEM) image at a first resolution. The method may also include acquiring a second SEM image at a second resolution. The method may further include providing an enhanced image by using the first SEM image as a reference to enhance the second SEM image. The enhanced image may be provided by using one or more features extracted from the first image to enhance the second SEM image, or using the first SEM image as a reference to numerically enhance the second SEM image.
Claims17
A method for enhancing an image, the method comprising:
- scanning a wafer simultaneously using an on-axis beam and at least one off-axis beam of a multi-beam system;
- acquiring a first scanning electron microscopy (SEM) image by use of the on-axis beam of the multi-beam system;
- acquiring a second SEM image by use of the at least one off-axis beam of the multi-beam system, wherein the first SEM image acquired via the on-axis beam has a higher resolution than the second SEM image acquired via the at least one off-axis beam;
- and
- providing an enhanced image, the enhanced image being provided by using the first SEM image as a reference to numerically enhance the second SEM image,
- wherein numerically enhancing the second SEM image comprises numerically blurring data representing the first SEM image to match data representing the second SEM image.
An inspection system, comprising:
- a memory storing a set of instructions;
- and
- a processor configured to execute the set of instructions to cause the inspection system to:
- scan a wafer simultaneously using an on-axis beam and at least one off-axis beam of a multi-beam system;
- acquire a first scanning electron microscopy (SEM) image by use of the on-axis beam of the multi-beam system;
- acquire a second SEM image by use of the at least one off-axis beam of the multi-beam system, wherein the first SEM image acquired via the on-axis beam has a higher resolution than the second SEM image acquired via the at least one off-axis beam;
- and
- provide an enhanced image, the enhanced image being provided by using the first SEM image as a reference to numerically enhance the second SEM image by numerically blurring data representing the first SEM image to match data representing the second SEM image.
Dependencies are inferred from the claim text.