Correction of aberrations in in-line electron holography
AssigneeFEI Company
InventorKonstantin Balashov
Life of this patent
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Abstract
Embodiments herein relate to a process for electron holography image aberration reduction. A system can comprise a memory that stores, and a processor that executes, computer executable components. The computer executable components can comprise a propagating component that reduces hologram aberration of an electron hologram (EH) image by modifying of a pair of sequenced parameters of an array upon which the EH image is constructed, resulting in a modified array, and a generating component that generates a propagated EH image using a propagator comprising the modified array.
Claims20
A system, comprising:
- a memory that stores computer executable components;
- and
- a processor that executes the computer executable components stored in the memory, wherein the computer executable components comprise:
- a propagating component that reduces hologram aberration of an electron hologram (EH) image by modifying of a pair of sequenced parameters of an array upon which the EH image is constructed, resulting in a modified array;
- and
- a generating component that generates a propagated EH image using a propagator comprising the modified array,
- wherein the propagator is a function of an exponential of a distance between an object and an emitter having been employed to generate the EH image of the object, a physical size of a detector having been employed to receive electrons from the emitter, and a wavelength of the electrons.
A computer-implemented method, comprising:
- reducing, by a system operatively coupled to a processor, hologram aberration at an electron hologram (EH) image by modifying, by the system, a pair of sequenced parameters of an array upon which the EH image is constructed, resulting in a modified array;
- and
- generating, by the system, a propagated EH image using a propagator comprising the modified array,
- wherein the propagator is a function of an exponential of a distance between an object and an emitter having been employed to generate the EH image of the object, a physical size of a detector having been employed to receive electrons from the emitter, and a wavelength of the electrons.
A computer program product facilitating a process for electron hologram aberration reduction, the computer program product comprising a computer readable storage medium having program instructions embodied therewith, and the program instructions executable by a processor to cause the processor to:
- reduce, by the processor, the hologram aberration at an electron hologram (EH) image by modifying, by the processor, a pair of sequenced parameters of an array upon which the EH image is constructed, resulting in a modified array;
- and
- generate, by the processor, a propagated EH image using a propagator comprising the modified array,
- wherein the propagator is a function of an exponential of a distance between an object and an emitter having been employed to generate the EH image of the object, a physical size of a detector having been employed to receive electrons from the emitter, and a wavelength of the electrons.
Dependencies are inferred from the claim text.