Method for producing hollow package and method for providing photosensitive composition
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsKenichi Yamagata, Takahiro Kondo, Hiroaki Takeuchi, Hirofumi Imai
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Abstract
A method for producing a hollow package, including forming a side wall on a substrate having an aluminum wire, and forming a top plate portion on the side wall to prepare a hollow structure accommodating the aluminum wire, in which the photosensitive composition that forms the side wall and/or the top plate portion contains an anion represented by General Formula (I1-an) in which A represents a heteroatom, X represents a halogen atom, R represents a monovalent organic group, k represents an integer of 1 to 6, m represents an integer of 0 to 5, n represents an integer of 1 to 3, and m/(k+m) is 0 or greater and less than 0.7.
Claims10
A method for producing a hollow package which includes a substrate having an aluminum wire, and a hollow structure accommodating the aluminum wire on the substrate, the method comprising:
- forming a side wall that surrounds the aluminum wire on the substrate having the aluminum wire;
- and
- forming a top plate portion on the side wall and preparing the hollow structure accommodating the aluminum wire,
- wherein the side wall and the top plate portion are formed by a method comprising developing a photosensitive resin film formed of a negative tone photosensitive composition with an organic developing solution,
- the negative tone photosensitive composition consists of at least one epoxy resin selected from the group consisting of an epoxy resin having a structure represented by General Formula (abp1) and a novolak epoxy resin,
- a cationic polymerization initiator consisting of a cationic moiety and an anionic moiety, provided that the anionic moiety contains an anion represented by General Formula (I1-an),
- a solvent, and
- at least one member selected from the group consisting of a metal oxide, a silane coupling agent and a sensitizer,
- wherein REP represents an epoxy group-containing group, Ra31 and Ra32 each independently represent a hydrogen atom or an alkyl group having 1 to 5 carbon atoms, and na31 represents an integer of 1 to 50,
- wherein A represents a heteroatom selected from the group consisting of boron, aluminum, gallium, phosphorus, arsenic, antimony, and bismuth, X represents a halogen atom, R represents a monovalent organic group, k represents an integer of 1 to 6, where a plurality of R's may be linked to each other to form a divalent or higher valent organic group coordinated to A in a case where k represents 2 or greater, m represents an integer of 0 to 5, n represents an integer of 1 to 3, and m/(k+m) is 0 or greater and less than 0.7.
A method for producing a hollow package which includes a substrate having an aluminum wire, and a hollow structure accommodating the aluminum wire on the substrate, the method comprising:
- forming a side wall that surrounds the aluminum wire on the substrate having the aluminum wire;
- and
- forming a top plate portion on the side wall and preparing the hollow structure accommodating the aluminum wire,
- wherein the side wall and/or and the top plate portion are formed from a photosensitive composition,
- the photosensitive composition contains a cationic polymerization initiator (I) consisting of a cationic moiety and an anionic moiety,
- the cationic polymerization initiator (I) comprises:
- a cationic polymerization initiator (I1) in which the anion moiety is an anion represented by General Formula (I1-an), and
- a cationic polymerization initiator (I3) represented by General Formula (I3-1) or (I3-2),
- wherein Rb01 to Rb04 each independently represent an aryl group which may have a substituent or a fluorine atom, where m/(k+m), which is a relational expression between the number (m) of fluorine atoms and the number (k) of aryl groups which may have a substituent, is 0 or greater and less than 0.7, q represents an integer of 1 or greater, and Qq+'s each independently represent a q-valent organic cation
- wherein A represents a heteroatom selected from the group consisting of boron, aluminum, gallium, phosphorus, arsenic, antimony, and bismuth, X represents a halogen atom, R represents a monovalent organic group, k represents an integer of 1 to 6, where a plurality of R's may be linked to each other to form a divalent or higher valent organic group coordinated to A in a case where k represents 2 or greater, m represents an integer of 0 to 5, n represents an integer of 1 to 3, and m/(k+m) is 0 or greater and less than 0.7,
- wherein Rb11 and Rb12 represent a cyclic group which may have a substituent other than a halogen atom, a chain-like alkyl group which may have a substituent other than a halogen atom, or a chain-like alkenyl group which may have a substituent other than a halogen atom, m represents an integer of 1 or greater, and each Mm+ independently represents an m-valent organic cation.
A method for producing a hollow package which includes a substrate having an aluminum wire, and a hollow structure accommodating the aluminum wire on the substrate, the method comprising:
- forming a side wall that surrounds the aluminum wire on the substrate having the aluminum wire;
- and
- forming a top plate portion on the side wall and preparing the hollow structure accommodating the aluminum wire,
- wherein the side wall and/or and the top plate portion are formed by a method comprising developing a photosensitive resin film formed of a negative tone photosensitive composition with an organic developing solution,
- the negative tone photosensitive composition consisting of:
- at least one epoxy resin selected from the group consisting of an epoxy resin having a structure represented by General Formula (abp1) and a novolak epoxy resin,
- a cationic polymerization initiator consisting of a cationic moiety and an anionic moiety, provided that the anionic moiety contains an anion represented by General Formula (I1-an),
- a solvent, and
- a silane coupling agent,
- wherein REP represents an epoxy group-containing group, Ra31 and Ra32 each independently represent a hydrogen atom or an alkyl group having 1 to 5 carbon atoms, and na31 represents an integer of 1 to 50,
- wherein A represents a heteroatom selected from the group consisting of boron, aluminum, gallium, phosphorus, arsenic, antimony, and bismuth, X represents a halogen atom, R represents a monovalent organic group, k represents an integer of 1 to 6, where a plurality of R's may be linked to each other to form a divalent or higher valent organic group coordinated to A in a case where k represents 2 or greater, m represents an integer of 0 to 5, n represents an integer of 1 to 3, and m/(k+m) is 0 or greater and less than 0.7.
Dependencies are inferred from the claim text.