Optical apparatus
AssigneeLeica Microsystems CMS GmbH
InventorsHilmar Gugel, Ingo Boehm
Life of this patent
Estimating the term…
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AssigneeLeica Microsystems CMS GmbH
InventorsHilmar Gugel, Ingo Boehm
Estimating the term…
An optical apparatus for examining a sample includes: an illumination unit for emitting illumination light in an illumination wavelength range onto the sample; a detection unit for collecting detection light in a detection wavelength range from the sample, the illumination wavelength range and the detection wavelength range partially overlapping in an intermediate wavelength range; and a light separating device for separating the illumination light and the detection light, the light separating device including a beam splitter having: a first splitting characteristic with one of transmitting and reflecting light of at least a first polarization state in the illumination wavelength range excluding the intermediate wavelength range; and a polarization-dependent second splitting characteristic with the one of transmitting and reflecting light of the first polarization state and the other of transmitting and reflecting light of a second polarization state in the intermediate wavelength range.
An optical apparatus for examining a sample, the optical apparatus comprising:
A method for examining a sample, comprising:
Dependencies are inferred from the claim text.