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US 12,631,822 B2Granted
Optical waveguide and method of manufacture thereof
AssigneeNTT, Inc.
InventorsXuejun Xu, Takehiko Tawara, Tai Tsuchizawa
Life of this patent
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Abstract
An optical waveguide includes a cladding layer, a Si layer, a REO layer, and a cap layer. The REO layer is made of a single-crystal rare earth oxide, and is formed on the Si layer. The cap layer is formed on the REO layer. The cap layer may be made of a material transparent to light to be guided. The cap layer has a stripe shape extending in a direction in which light is guided.
Claims19
An optical waveguide comprising:
- a cladding layer;
- a Si layer made of single-crystal Si and on the cladding layer;
- a rare earth oxide (REO) layer made of a single-crystal rare earth oxide and disposed on the Si layer;
- and
- a stripe-shaped cap layer on the REO layer and extending in a direction in which light is guided,
- wherein
- a width of the stripe-shaped cap layer is in a range of 2.45 μm to 3.0 μm, and
- a leakage loss of guided light with a wavelength of 1462 nm is not more than 4.96 dB/cm.
5 more elements
A method of manufacturing an optical waveguide, the method comprising:
- forming a Si layer made of single-crystal Si over a cladding layer;
- forming a rare earth oxide (REO) layer contacting the Si layer, the REO layer being made of a single-crystal rare earth oxide;
- and
- depositing a cap layer over the REO layer;
- and
- patterning the cap layer to form a stripe-shaped cap layer on the REO layer and extending in a direction in which light is guided,
- wherein:
- a width of the stripe-shaped cap layer is in a range of 2.45 μm to 3.0 μm, and
- a leakage loss of guided light with a wavelength of 1462 nm is not more than 4.96 dB/cm.
6 more elements
Dependencies are inferred from the claim text.