Biomarker sensing structure
AssigneeInternational Business Machines Corporation
InventorsAlexander Reznicek, Bahman Hekmatshoartabari, Martin G. Keen, Jeremy R. Fox
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Abstract
A biosensor device is provided. The biosensor includes an amplifying bipolar junction transistor (BJT) and a sensing BJT defining a sensing trench. The sensing BJT and the amplifying BJT are coupled to form a Sziklai pair with an emitter of the sensing BJT connected to a collector of the amplifying BJT and a collector of the sensing BJT connected to a base of the amplifying BJT.
Claims22
A biosensor device, comprising:
- an amplifying bipolar junction transistor (BJT);
- and
- a sensing BJT defining a sensing trench,
- the sensing BJT and the amplifying BJT being coupled to form a Sziklai pair with an emitter of the sensing BJT connected to a collector of the amplifying BJT and a collector of the sensing BJT connected to a base of the amplifying BJT.
A biosensor device, comprising:
- an amplifying bipolar junction transistor (BJT) arranged as a NPN transistor;
- and
- a sensing BJT defining a sensing trench and being arranged as a PNP transistor,
- the sensing BJT and the amplifying BJT being coupled to form a Sziklai pair characterized in that an emitter of the sensing BJT is connected to a collector of the amplifying BJT to serve as an emitter for the Sziklai pair, a collector of the sensing BJT is connected to a base of the amplifying BJT and an emitter of the amplifying BJT serves as a collector for the Sziklai pair.
A biosensor device, comprising:
- an amplifying bipolar junction transistor (BJT) arranged as an PNP transistor;
- and
- a sensing BJT defining a sensing trench and being arranged as a NPN transistor,
- the sensing BJT and the amplifying BJT being coupled to form a Sziklai pair characterized in that a collector of the sensing BJT is connected to a base of the amplifying BJT, an emitter of the amplifying BJT serves as a collector for the Sziklai pair and an emitter of the sensing BJT is connected to a collector of the amplifying BJT to serve as an emitter for the Sziklai pair.
A method of assembling a biosensor device, the method comprising:
- forming an amplifying bipolar junction transistor (BJT) as a lateral transistor;
- forming a sensing BJT, which comprises a sacrificial layer interposed between lower and upper intrinsic bases, as a vertical transistor on the amplifying BJT;
- coupling the sensing BJT and the amplifying BJT to form a Sziklai pair;
- and
- etching the sacrificial layer such that the sensing BJT defines a sensing trench.
A method of assembling a biosensor device, the method comprising:
- forming an amplifying bipolar junction transistor (BJT) as a lateral transistor;
- forming a sensing BJT, which comprises a sacrificial layer interposed between lower and upper intrinsic bases, as a vertical transistor on the amplifying BJT;
- coupling the sensing BJT and the amplifying BJT to form one of a Sziklai pair with an NPN-PNP arrangement and a Sziklai pair with a PNP-NPN arrangement;
- and
- etching the sacrificial layer such that the sensing BJT defines a sensing trench.
Dependencies are inferred from the claim text.