Spectrum analysis apparatus and database creation method
AssigneeJEOL Ltd.
InventorsShogo Koshiya, Takanori Murano
Life of this patent
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Abstract
A plurality of records are registered in a database. Each record includes emission information and a peak energy sequence. A fitting unit fits, for each peak energy sequence, a calculated spectrum which is based on the peak energy sequence with respect to an actual spectrum which is acquired from a sample. An analyzer analyzes the sample based on the emission information correlated to the calculated spectrum satisfying a fitting condition.
Claims9
A spectrum analysis apparatus comprising:
- a database in which a peak energy sequence correlated to emission information is registered;
- a soft X-ray spectrometer configured to acquire an actual spectrum from a sample using soft X-ray emission spectroscopy;
- and
- a processor, wherein
- the processor is configured to:
- fit a calculated spectrum which is based on the peak energy sequence with respect to the actual spectrum acquired from the sample;
- and
- analyze the sample based on the emission information correlated to the calculated spectrum when the calculated spectrum satisfies a fitting condition,
- wherein the emission information is formed from a plurality of information items,
- wherein the plurality of information items comprise information for specifying an element which caused an emission, and information for specifying a type of emission, and
- wherein the plurality of information items comprise information for specifying a compound containing the element which caused the emission, and information for specifying a crystal structure of the compound.
A non-transitory storage medium storing a program executed by an information processing device, the program, when executed, causing the information processing device to perform a process comprising:
- controlling a soft X-ray spectrometer to acquire an actual spectrum from a sample using soft X-ray emission spectroscopy;
- acquiring a peak energy sequence correlated to emission information;
- fitting a calculated spectrum which is based on the peak energy sequence with respect to the actual spectrum acquired from the sample;
- and
- analyzing the sample based on the emission information correlated to the calculated spectrum when the calculated spectrum satisfies a fitting condition,
- wherein the emission information is formed from a plurality of information items,
- wherein the plurality of information items comprise information for specifying an element which caused an emission, and information for specifying a type of emission, and
- wherein the plurality of information items comprise information for specifying a compound containing the element which caused the emission, and information for specifying a crystal structure of the compound.
Dependencies are inferred from the claim text.