Analyzing method and analyzer

An analyzer comprising:

• an electron optical system that irradiates a specimen with an electron beam;
• a wavelength-dispersive X-ray spectrometer that has an analyzing element to analyze an X-ray emitted from the specimen and detects an X-ray of energy corresponding to a position of the analyzing element;
• a storage that stores information;
• and
• a control unit that controls the electron optical system and the wavelength-dispersive X-ray spectrometer,
• the control unit performing processing for:
• acquiring a plurality of map data by repeatedly performing a mapping analysis while causing the wavelength-dispersive X-ray spectrometer to change the position of the analyzing element in between each mapping analysis, the mapping analysis being an analysis to cause the wavelength-dispersive X-ray spectrometer to detect an X-ray of specific energy with the position of the analyzing element fixed to acquire map data while scanning the specimen with an electron beam;
• and
• generating, based on the plurality of map data, a spectrum map in which a position on the specimen and an X-ray spectrum are associated with each other,
• wherein,
• the storage unit stores information showing a relationship between a displacement amount of a height of the specimen and a spectrum shift amount.

An analyzer comprising:

• an electron optical system that irradiates a specimen with an electron beam;
• a deflector that deflects the electron beam;
• a wavelength-dispersive X-ray spectrometer that has an analyzing element to analyze an X-ray emitted from the specimen and detects an X-ray of energy corresponding to a position of the analyzing element;
• a storage that stores information;
• and
• a control unit that controls the electron optical system and the wavelength-dispersive X-ray spectrometer,
• the control unit performing processing for:
• acquiring a plurality of map data by repeatedly performing a mapping analysis while causing the wavelength-dispersive X-ray spectrometer to change the position of the analyzing element in between each mapping analysis, the mapping analysis being an analysis to cause the wavelength-dispersive X-ray spectrometer to detect an X-ray of specific energy with the position of the analyzing element fixed to acquire map data while scanning the specimen with an electron beam;
• and
• generating, based on the plurality of map data, a spectrum map in which a position on the specimen and an X-ray spectrum are associated with each other,
• wherein,
• the storage unit stores information showing a relationship between a deflection amount of the electron beam and the spectrum shift amount.