Acoustic particle counter for nanoparticles in liquids
AssigneeOvivo Inc.
InventorsNajib Alia, Ian Briggs, Philippe Rychen
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AssigneeOvivo Inc.
InventorsNajib Alia, Ian Briggs, Philippe Rychen
Estimating the term…
In semiconductor manufacture requiring ultra high purity water, particles of specified sizes are detected using acoustic particle detection capable of detecting nanoparticles. A sensor unit receives a flow of water, with the pressure and rate of flow to the sensor controlled closely. In each sensor unit is a measurement cell to receive a continuous flow of water, with a transducer module engaged with the cell to deliver an acoustic pulse at a known level of intensity as the liquid flows through the cells, the acoustic pulse acting on the liquid at a focus zone to cause cavitation in the event a particle of size detectable at that intensity is present. A waveform emitter/receiver connected to the sensor unit sends high-frequency, high-voltage signal to the transducer module to cause the acoustic pulse, and it also receives a waveform echo indicating a cavitation event. The system is controlled by a microprocessor.
An acoustic particle counter for nanoparticles in liquid, comprising:
An acoustic particle counter for nanoparticles in liquid, comprising:
A method for monitoring purity of a continuously flowing liquid medium by detection of quantity and size of sub-micron particles or impurities present in the liquid medium, comprising:
A method for monitoring purity of a continuously flowing liquid medium by detection of quantity and size of sub-micron particles or impurities present in the liquid medium, comprising:
Dependencies are inferred from the claim text.