Array lens module calibration equipment and calibration method thereof

An array lens module calibration equipment, comprising:

• a carrying platform, configured to carry an array lens module, wherein the array lens module has an optical axis and comprises a substrate, a calibration via through the substrate, a plurality of lens frames disposed on the substrate, and a plurality of lens sets respectively disposed in the plurality of lens frames;
• a visual positioning module, configured to provide a visual positioning beam to the array lens module, and capture an appearance of the array lens module to obtain appearance information of the array lens module;
• a laser alignment module, configured to provide a calibration laser beam which is imaged after passing through the calibration via and the plurality of lens sets so as to obtain alignment information;
• a depth-of-field measurement module, configured to capture a depth-of-field image of the plurality of lens sets to obtain depth-of-field information of the plurality of lens sets;
• and
• a coplanarity adjustment module, configured to adjust relative positions of the plurality of lens frames relative to the substrate in an optical axis direction parallel to the optical axis based on the appearance information, the alignment information, and the depth-of-field information.