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US 12,631,504 B2Granted
Sensor member for physical quantity detection
AssigneeTDK Corporation
InventorsMasanori Kobayashi, Ken Unno, Tetsuya Sasahara, Tetsuo Hata, Lucie Ouedraogo
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Abstract
A sensor member including a membrane; a protective film covering a part of the membrane; and an electrode portion connected to the membrane, wherein the electrode portion covers at least a part of the protective film, whereby a peeling defect such as peeling off from an end of the protective film or damage due to impact can be prevented.
Claims11
A sensor member comprising:
- a membrane;
- a protective film covering a part of the membrane;
- and
- an electrode portion connected to the membrane,
- wherein the membrane comprises a strain-resistance film,
- wherein the protective film has insulating properties, and covers a part of the strain-resistance film, and
- wherein the electrode portion covers at least a part of the protective film, and is in contact with the strain-resistance film at a portion where the strain-resistance film is not covered with the protective film.
4 more elements
Dependencies are inferred from the claim text.