Combined six-dimensional force sensor based on thin-film sputtering technology

A combined six-dimensional force sensor based on thin-film sputtering technology, comprising a cross beam, a force transmission table, a top cover, a base, a bottom cover and strain gauges;

• wherein
• the cross beam comprises a center boss, main beams, floating beams and square corners, the center boss is a cylinder of a cuboid structure located at a center of the cross beam and has a square section;
• four connecting holes are formed on the center boss, and an upper surface of the center boss is connected with the force transmission table through the four connecting holes;
• four side surfaces of the center boss are connected with the main beams;
• the main beams are four rectangular beams with a rectangular section;
• one end of each of the main beams is connected with the center boss, and the other end of the each of the main beams is connected with a corresponding floating beam;
• the floating beams located on peripheries of the cross beam are four rectangular thin-walled beams with a rectangular section;
• a center of an inner side surface of each of the floating beams is connected with a corresponding main beam, and both ends of the each of the floating beams are connected with the corresponding square corners;
• the square corners located at four corners of the cross beam are four cylinders of a cuboid structure with a square section;
• other four connecting holes are formed on the square corners for connection with a middle plate of the base;
• the center boss is located in a middle of the cross beam, and the each of the floating beams is on a periphery of the cross beam;
• the force transmission table is a cylinder of a cuboid structure and has a square section;
• and four threaded holes are formed separately on an upper surface of the force transmission table and a lower surface of the force transmission table, the lower surface of the force transmission table is connected with the upper surface of the center boss of the cross beam in a threaded manner, and the upper surface of the force transmission table is connected with a lower surface of the top cover in a threaded manner;
• the force transmission table is connected with the center boss of the cross beam through threads;
• the square corners of the cross beam are connected with the middle plate of the base through threads;
• the top cover is connected with the force transmission table through threads;
• and the bottom cover and the base are connected through mounting holes;
• and
• a number of the strain gauges is 24 with corresponding numbers R1-R24;
• the strain gauges R1-R20 sputtered on the cross beam are identical, the strain gauges R1-R20 have a same initial resistance value and are all uniaxial strain gauges, a resistance value decreases during shrinking along an axial direction, and the resistance value increases when extending along the axial direction;
• the strain gauges R21-R24 sputtered on the force transmission table are torque-pattern strain gauges with the same initial resistance value, where a strain gauge R21 and a strain gauge R23 are sensitive to a strain with an angle of 45° against an axis, the resistance value of the strain gauge R21 and the resistance value of the strain gauge R23 decreases when shrinking along a direction with an angle of 45° against the axis, and the resistance value increases when extending along the direction;
• a strain gauge R22 and a strain gauge R24 are sensitive to a strain with an angle of 135° against the axis, the resistance value of the strain gauge R22 and the resistance value of the strain gauge R24 decreases when shrinking along a direction with an angle of 135° against the axis, and the resistance value increases when extending along the direction;
• a strain gauge R1 and a strain gauge R7 are sputtered separately on an upper surface of a first one of the main beams and a lower surface of the first one of the main beams of the cross beam close to the center boss in a negative X direction, a strain gauge R2 and a strain gauge R8 are sputtered separately on an upper surface of a second one of the main beams and a lower surface of the second one of the main beams of the cross beam close to the center boss in a positive X direction, a strain gauge R3 and a strain gauge R9 are sputtered separately on the upper surface of the first one of the main beams and the lower surface of the first one of the main beams of the cross beam away from the center boss in the negative X direction, a strain gauge R5 and a strain gauge R11 are sputtered separately on the upper surface of the second one of the main beams and the lower surface of the second one of the main beams of the cross beam away from the center boss in the positive X direction, a strain gauge R4 and a strain gauge R10 are sputtered separately on an upper surface of a third one of the main beams and a lower surface of the third one of the main beams of the cross beam away from the center boss in a positive Y direction, a strain gauge R6 and a strain gauge R12 are sputtered separately on an upper surface of a fourth one of the main beams and a lower surface of the fourth one of the main beams of the cross beam away from the center boss in a negative Y direction, a strain gauge R13 and a strain gauge R14 on an outer side of a first one of the floating beams are sputtered separately on both sides of an intersection between the first one of the main beams and the first one of the floating beams of the cross beam in the negative X direction, a strain gauge R17 and a strain gauge R18 on an outer side of a second one of the floating beams are sputtered separately on both sides of an intersection between the second one of the main beams and the second one of the floating beams of the cross beam in the positive X direction, a strain gauge R19 and a strain gauge R20 on an outer side of a third one of the floating beams are sputtered separately on both sides of an intersection between the fourth one of the main beams and the third one of the floating beams of the cross beam in the negative Y direction, and a strain gauge R15 and a strain gauge R16 on an outer side of a fourth one of the floating beams are sputtered separately on both sides of an intersection between the third one of the main beams and the fourth one of the floating beams of the cross beam in the positive Y direction;
• a strain gauge R23 and a strain gauge R24 are sputtered separately on both sides of a central axis in a side surface of the force transmission table in the negative Y direction close to the center boss of the cross beam, and a strain gauge R21 and a strain gauge R22 are sputtered separately on both sides of the central axis in a side surface of the force transmission table in the positive Y direction close to the center boss of the cross beam;
• and under the premise of ensuring no position interference, all strain gauges are sputtered at positions where the strain is as large as possible when each of an elastic part is stressed.