Electromagnetic wave sensor and manufacturing method thereof

An electromagnetic wave sensor comprising:

• a first substrate;
• a second substrate that faces the first substrate and that allows infrared rays to pass through at least a part of the second substrate;
• a first circumferential wall that is positioned between the first substrate and the second substrate and that forms a first space together with the first substrate and the second substrate;
• a second circumferential wall that is positioned between the first substrate and the second substrate, that surrounds the first circumferential wall, and that forms a second space together with the first substrate and the second substrate and the first circumferential wall;
• bolometer structures that are provided in the first space;
• a first measuring element that is provided in the first space and that is used for taking a first measurement relating to pressure P1 in the first space;
• a second measuring element that is provided in the second space and that is used for taking a second measurement relating to pressure P2 in the second space;
• and
• a monitoring portion, wherein
• the second measuring element is provided so as to be less thermally separated from the first substrate or the second substrate than the bolometer structures that are provided in the first space;
• and
• the monitoring portion acquires the first measurement that is taken using the first measuring element and the second measurement that is taken using the second measuring element and outputs a predetermined signal indicating an abnormality based on at least the first measurement and the second measurement.