Optical inspection device and optical inspection method
AssigneeSamsung Display Co., Ltd.
InventorsJe Won Yoo, In Hyuk Kim, Joo Yeol Lee
Life of this patent
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Abstract
An optical inspection device includes an optical measurement unit, a first probe under the optical measurement unit and configured to supply a first voltage, a base frame under the optical measurement unit and spaced from the first probe, and a second probe on a surface of the base frame facing the first probe, configured to supply a second voltage different from the first voltage, and having a plate shape in a plan view.
Claims20
An optical inspection device comprising:
- an optical measurement unit;
- a first probe spaced from the optical measurement unit and configured to supply a first voltage;
- a base frame under the optical measurement unit and spaced from the first probe;
- and
- a second probe on a surface of the base frame proximate the first probe, the base frame being interposed between the optical measurement unit and the second probe, the second probe being configured to supply a second voltage different from the first voltage, and having a plate shape in a plan view.
An optical inspection method of a light emitting element structure using an optical measurement unit, the light emitting element structure comprising a base substrate, a first semiconductor connection layer on the base substrate, and a plurality of light emitting elements on the first semiconductor connection layer and spaced from each other, the method comprising:
- bringing a first probe in contact with the first semiconductor connection layer and bringing a second probe in contact with an end surface of at least one of the plurality of light emitting elements;
- transmitting electrical signals to the first probe and the second probe;
- and
- inspecting light emitted from the at least one of the plurality of light emitting elements,
- wherein the second probe is on a surface of a base frame proximate the first probe, the base frame being interposed between the optical measurement unit and the second probe.
Dependencies are inferred from the claim text.