Fully decoupled three-axis MEMS gyroscope

A decoupled three-axis MEMS gyroscope, the decoupled three axis MEMS gyroscope is in the shape of a rectangle;

• comprising:
• a base, comprising:
• a coupling anchor point located at a center of the rectangle;
• and
• a coupling structure elastically connected to the coupling anchor point;
• a driving unit coupled with a sensing unit and driving the sensing unit to move, comprising:
• four driving members respectively located at inner positions of four corners of the rectangle and elastically connected to the base, wherein the four driving members are all frame-shaped and annularly and symmetrically arranged around the coupling anchor point, and an avoiding interval is formed between adjacent driving members;
• and
• the sensing unit elastically connected to the base, comprising:
• two X mass blocks symmetrically arranged in two of the avoiding intervals oppositely arranged and each X mass block is elastically connected to the coupling structure and two of the four driving members are located on both sides of one of the X mass blocks;
• two Y mass blocks symmetrically arranged in the other two of the avoiding intervals oppositely arranged and each Y mass block is elastically connected to the coupling structure and two of the four driving members are located on both sides of one of the Y mass blocks;
• four Z mass blocks are located at the four corners of the rectangle, and each Z mass block is connected to one of the four driving members located at the corresponding corner of the rectangle;
• and
• four Z detection decoupling members respectively elastically connected to the adjacent Z mass blocks and arranged around the rectangle,
• wherein the adjacent Z detection decoupling members are elastically connected;
• each Z mass block is located on an outside of each driving member away from the coupling anchor point, and each Z detection decoupling member is located on an outside of each Z mass block away from the coupling anchor point;
• wherein the base further comprises side anchor points;
• two sides of a top of each Z detection decoupling member are both extended to form a third flexible beam whose middle portion is connected to each side anchor point, and the middle portion of each third flexible beam is extended toward a groove opened inside each side anchor point to form a bent portion;
• wherein an end of each X mass block away from the coupling structure and an end of each Y mass block away from the coupling structure is provided with a lateral slit;
• the base further comprises intermediate structures spaced apart from a side of each X mass block away from the coupling structure or a side of each Y mass block away from the coupling structure, and each X mass block and each Y mass block are both extended toward the lateral slit to form a lateral flexible beam connected to the intermediate structure;
• the end of each third flexible beam away from the Z detection decoupling member is connected to one of the intermediate structure;
• both sides of each driving member are both extended along a direction of a space between each Z mass block and each X mass block or each Y mass block to form two fourth flexible beams of corresponding ones of the side anchor points, the end of each of the two fourth flexible beams away from the corresponding driving member is connected to one of the intermediate structures.