Continuous bump measurement height metrology

A measurement system for measuring height differences between tops of multiple bumps and corresponding areas of an upper surface of a layer, the system comprises:

• one or more measurement units and at least one processing unit that are configured to:
• perform first measurements of the height differences between the bumps and the corresponding areas, by illuminating the bumps and the corresponding areas with first radiation at angle α relative to a normal to the layer;
• wherein the first measurements are subjected to first measurement errors resulting from a virtual penetration of the first illumination into the layer;
• wherein each bump has a corresponding area that is proximate to the bump;
• perform second measurements of thickness of the layer at the corresponding areas;
• wherein at least some of the first measurements are executed in parallel to an executing of at least some of the second measurements;
• determine first measurement errors, based on b, being a thickness of the layer as measured by the second measurements, α and n, being a refraction index of the layer;
• and
• determine the height differences between the bumps and the corresponding areas based on the first measurements and the first measurements errors.

A non-transitory computer readable medium for measuring height differences between tops of multiple bumps and corresponding areas of an upper surface of a layer, the non-transitory computer readable medium stores instructions for:

• performing first measurements of the height differences between the bumps and the corresponding areas, by illuminating the bumps and the corresponding areas with first radiation at angle α relative to a normal to the layer,
• wherein the first measurements are subjected to first measurement errors resulting from a virtual penetration of the first illumination into the layer,
• wherein each bump has a corresponding area that is proximate to the bump;
• performing second measurements of thickness of the layer at the corresponding areas, and
• wherein at least some of the first measurements are executed in parallel to an executing of at least some of the second measurements;
• determining first measurement errors, based on b, being a thickness of the layer as measured by the second measurements, a and n, being a refraction index of the layer;
• and
• determining the height differences between the bumps and the corresponding areas based on the first measurements and the first measurements errors.