Plating method and plating apparatus
AssigneeEbara Corporation
InventorsKazuhito Tsuji, Mizuki Nagai
Life of this patent
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AssigneeEbara Corporation
InventorsKazuhito Tsuji, Mizuki Nagai
Estimating the term…
Provided is a technique that allows removing gas bubbles attached to a hole of an ionically resistive element. A plating method includes: stirring a plating solution by driving a paddle arranged above the ionically resistive element in a state where an anode and the ionically resistive element are immersed in the plating solution (step S20); immersing a substrate as a cathode in the plating solution in a state where the stirring of the plating solution with the paddle is stopped (step S40); resuming the stirring of the plating solution with the paddle arranged above the ionically resistive element and below the substrate in a state where the substrate is immersed in the plating solution (step S50); and performing a plating process on the substrate by flowing electricity between the substrate and the anode in a state where the stirring of the plating solution with the paddle is resumed (step S60).
A plating method comprising:
Dependencies are inferred from the claim text.