Device for manufacturing a semiconductor device and method for manufacturing a semiconductor device using the same

A device for manufacturing a semiconductor device comprising:

• a tube extending in a first direction, the tube defining a reaction space therein and configured to accommodate a boat that is configured to receive a plurality of substrates therein;
• and
• first and second nozzles each extending in the first direction inside the tube, the first and second nozzles being apart from each other on a horizontal plane that is perpendicular to the first direction and parallel to upper surfaces of the plurality of substrates,
• wherein the first nozzle includes a plurality of first injection ports and the second nozzle includes a plurality of second injection ports, the plurality of first injection ports and the plurality of second injection ports configured to inject a first gas and a second gas different from the first gas toward a center of the reaction space, respectively, and
• wherein the reaction space includes a plurality of regions along the first direction, and the plurality of second injection ports are in a first region, among the plurality of regions, between two adjacent first injection ports of the plurality of first injection ports.