Compositions for depositing material, synthesis methods and uses

A method of depositing group 13 metal-containing material on a substrate using a composition comprising a metal alkyl precursor, wherein the metal alkyl precursor comprises a group 13 metal atom and two different alkyl ligand types comprising a first ligand type and a second ligand type;

• wherein the first ligand type is a branched C4 to C8 alkyl bonded to the group 13 metal atom through a carbon atom that is bonded to three carbon atoms, and the second ligand type is a linear C1 to C4 alkyl,
• wherein the group 13 metal atom is bonded to two ligands of the first ligand type, wherein the second ligand type forms a bridge between two metals atoms comprising the group 13 metal atom, and a ratio of first ligand type to second ligand type in the composition is about two to one, and
• wherein the metal alkyl precursor is represented by the following formula, where M represents the group 13 metal atom, L1 represents the first ligand type and L2 represents the second ligand type

A method of depositing carbon-containing material on a substrate using a composition comprising a metal alkyl precursor, wherein the metal alkyl precursor comprises a group 13 metal atom and two different alkyl ligand types comprising a first ligand type and a second ligand type,

• wherein the first ligand type is a branched C4 to C7 alkyl bonded to the group 13 metal atom through a carbon atom that is bonded to three carbon atoms, and the second ligand type is a linear C1 to C4 alkyl,
• wherein the group 13 metal atom is bonded to two ligands of the first ligand type, wherein the second ligand type forms a bridge between two metals atoms comprising the group 13 metal atom, and a ratio of first ligand type to second ligand type in the composition is about two to one, and
• wherein the metal alkyl precursor is represented by the following formula, where M represents the group 13 metal atom, L1 represents the first ligand type and L2 represents the second ligand type

An assembly comprising a reactant vessel and a composition contained therein, the composition comprising a metal alkyl precursor, wherein the metal alkyl precursor comprises a group 13 metal atom and two different alkyl ligand types comprising a first ligand type and a second ligand type;

• wherein the first ligand type is a branched C4 to C8 alkyl bonded to the group 13 metal atom through a carbon atom that is bonded to three carbon atoms, and the second ligand type is a linear C1 to C4 alkyl,
• wherein the group 13 metal atom is bonded to two ligands of the first ligand type, wherein the second ligand type forms a bridge between two metals atoms comprising the group 13 metal atom, and a ratio of first ligand type to second ligand type in the composition is about two to one, and
• wherein the metal alkyl precursor is represented by the following formula, where M represents the group 13 metal atom, L1 represents the first ligand type and L2 represents the second ligand type