Radiation sensitive organotin compositions having oxygen heteroatoms in hydrocarbyl ligand

An organotin composition represented by the formula RSnL3, where L is a hydrolysable ligand and R— is A) an aromatic ether represented by the formula Ar—O—(CR′2)m—, or B) R is a cyclic ether represented by the formula cyclic(O(CR″2)nCR′R0—), or C) R is a halogenated ether represented by the formula R1OR0C(R2R3)—, or D) R is a polyether represented by the formula R1R2R3C—, where Ar is an aromatic organic moiety;

• m is an integer from 1 to 4;
• R′ is a hydrogen or a hydrocarbyl group with 1 to 6 carbon atoms and optional heteroatoms;
• n is an integer from 1 to 8;
• R″ is a hydrogen or hydrocarbyl group with 1 to 4 carbon atoms and optional heteroatoms;
• optionally a CR″2 group can be replaced with an O to form a cyclic polyether, and two R″ groups can combine to form a polycyclic structure;
• R0 is a bond or a hydrocarbyl group with 1 to 5 carbon atoms and optional heteroatoms;
• R1 is a hydrocarbyl group with 1 to 10 carbon atoms, with optional unsaturated bonds and/or optional hetero atoms;
• R2 and R3 are independently hydrogen, halogen or hydrocarbyl groups with 1 to 7 carbon atoms, with optional unsaturated bonds and/or optional heteroatoms, wherein at least one of R1, R2, R3 have a halogen atom;
• and R1, R2, and R3 are independently hydrocarbyl groups with 1 to 19 carbon atoms, with optional unsaturated bonds and/or optional heteroatoms, at least two of R1, R2, R3 are ether moieties or at least one of R1, R2, R3 is a diether moiety.